研究者学術情報データベース

スズキ　ケンイチロウ
鈴木　健一郎
SUZUKI Kenichiro

所属理工学部機械工学科

職名教授

学会発表
1.	2019/11/19	Evaluation on a 500 kHz electrostatic MEMS oscillator using a differential circuit (Proceedings of the 36th Sensor Symposium, Hamamatsu, 20pm3-LN2-86)
2.	2019/11/19	Frequency-stable tuning fork MEMS resonator integrated with a p-n diode temperature sensor (Proceedings of the 36th Sensor Symposium, 20am2-LN2-79)
3.	2019/11/19	Quasi-millimeter silicon hybrid antenna with a MEMS phase-shifter protected by permanent resist (Proceedings of the 36th Sensor Symposium, 20am2-LN2-87)
4.	2019/11/19	Vibratory silicon MEMS antenna integrated with a beam forming antenna array (Proceedings of the 36th Sensor Symposium, 20pm3-LN2-84)
5.	2019/11/14	Development of a mechanically-vibrating MEMS antenna installed with a linear RF antenna array element (Proc. of The 4th Internatioanal Symposium on Biomedical Engineering (ISBE), P1-54)
6.	2019/11/14	Qasi-millimeter wave MEMS phase-shifter with through-holes passivated by permanent resisit (Proc. of The 4th Internatioanal Symposium on Biomedical Engineering (ISBE), P2-62)
7.	2018/12	流体を利用した広帯域周波数可変MEMSアンテナの開発 (信学技報（IEICE Technical Report） MW2018-120, pp. 37-42)
8.	2018/12	凖ミリ波帯シリコンハイブリッドMEMSフェイズドアレイアンテナの基礎検討 (信学技報（IEICE Technical Report） MW2018-119, pp. 31-35)
9.	2018/11/13	5 MHz p-n diode longitudinal extensional mode resonator with high efficiency (Digest of 2018 International Microprocesses and Nanotechnology Conference)
10.	2018/11/08	Non-contact motion detective sensor utilizing a mechanically-vibrating MEMS antenna (Proc. of The 3rd Internatioanal Symposium on Biomedical Engineering (ISBE))
11.	2018/11/03	Laterally-driven MEMS tuning fork resonator with a p-n diode actuator and p-n diode sensor (Digest of 2018 International Microprocesses and Nanotechnology Conference)
12.	2018/11/01	Development for wide frequency-variable fluid MEMS antenna fabricated on a silicon substrate (Proceedings of the 10th Integrated MEMS Symposium, 01pm2-C-6)
13.	2018/10/30	Characterization of p-n diode sensor using an MEMS tuning-fork resonator (Proceedings of the 10th Integrated MEMS Symposium, Sapporo, , 30pm2-A-4)
14.	2018/10/30	Control of resonant frequency for tuning fork MEMS resonators (Proceedings of the 10th Integrated MEMS Symposium, 30pm2-A-1)
15.	2018/10/30	Development of a mechanically-vibrating MEMS antenna installed with a silicon antenna (Proceedings of the 35th Sensor Symposium on Sensors, Micromachines and Applied Systems,)
16.	2018/10/30	Improvement of the efficiency of a p-n diode actuator installed on in-plane vibrational silicon MEMS resonators (Proceedings of the 10th Integrated MEMS Symposium, 30pm3-A-3)
17.	2018/10/30	Improvement of the oscillation condition in MEMS oscillators (Proceedings of the 10th Integrated MEMS Symposium, 30pm2-A-2)
18.	2018/09/14	LTCC基板を使った凖ミリ波帯ハイブリッドMEMSフェーズドアレイアンテナの基礎検討 (電子情報通信学会ソサイエティ大会、B-1-100)
19.	2018/09/13	凖ミリ波帯シリコンハイブリッドMEMSフェーズドアレイアンテナの基礎検討 (電子情報通信学会ソサイエティ大会、B-1-93)
20.	2018/03/18	MEMS マイクロエレクトロニクス半世紀の流れー私的追想― (第65回応用物理学会春季学術講演会　講演予稿集,　18p-G201-16)
21.	2017/11/09	Millimeter-wave radar with vibratory MEMS Yagi-Uda antenna (Proc. of The 2nd Internatioanal Symposium on Biomedical Engineering (ISBE))
22.	2017/11/06	5 MHz pn-diode resonator with in-plane lingitudinal extensional mode (Digest of 2017 International Microprocesses and Nanotechnology Conference)
23.	2017/10/31	Application of a tuning fork MEMS resonator to oscillators (Proceedings of the 9th Integrated MEMS Symposium)
24.	2017/10/31	Development of a fluid variable capacitor with fluid channel (Proceedings of the 9th Integrated MEMS Symposium)
25.	2017/10/31	Evaluation of transduction efficiency for actuator/sensor of pn-diode MEMS resonators (Proceedings of the 9th Integrated MEMS Symposium)
26.	2017/10/31	Fabrication of quasi-millimeter wave band hybrid MEMS phased-array antenna (Proceedings of the 9th Integrated MEMS Symposium)
27.	2017/10/31	Fundamental research on variable frequency fluid MEMS antenna (Proceedings of the 9th Integrated MEMS Symposium)
28.	2017/10/31	Study on installation of antenna on a mechanically vibrating MEMS antenna (Proceedings of the 9th Integrated MEMS Symposium)
29.	2017/08/01	ピコリットル流体搬送の誘電率変化を利用した広帯域MEMS高周波可変デバイスの研究 (SCAT技術情報誌（TELECOM FRONTIER）, No. 97, pp.1-8)
30.	2016/11/08	Development of a Small RF Variable Capacitor Integrated with Automatic Fluid Carrying System (Digest of 2016 International Microprocesses and Nanotechnology Conference)
31.	2016/10/26	Evaluation on temperature variation of resonant frequency for MEMS resonators (Proceedings of the 8th Integrated MEMS Symposium)
32.	2016/10/26	Evaluation on mechanical vibration of pn-diode ring actuator (Proceedings of the 8th Integrated MEMS Symposium)
33.	2016/10/26	RF evaluation on MEMS phase-shifter using LTCC (Proceedings of the 8th Integrated MEMS Symposium, Hirado, The Japan Society of Applied Physics)
34.	2016/10/26	RF variable capacitor with automatic control of liquid (Proceedings of the 8th Integrated MEMS Symposium)
35.	2016/10/25	Wireless power supply for a vibratory MEMS Yagi-Uda antenna (Proceedings of the 8th Integrated MEMS Symposium)
36.	2016/09/23	LTCC基板を用いたMEMS移相器のRF特性評価 (電子情報通信学会ソサイエティ大会)
37.	2016/09/23	MEMS振動式アンテナ給電機構の基本電気評価 (電子情報通信学会ソサイエティ大会)
38.	2016/09/23	流体自動搬送機能をもつ高周波可変キャパシタの開発 (電子情報通信学会ソサイエティ大会)
39.	2016/04/17	Silicon MEMS actuator with no space gap between driving electrodes (Proc. the 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS))
40.	2015/11/10	20 MHz pn-diode silicon ring resonator with in-plane vibration mode (Digest of 2015 International Microprocesses and Nanotechnology Conference, 13P-11-98)
41.	2015/11/10	Evaluation on 60 MHz single-crystal silicon pn diode viration sensors (Digest of 2015 International Microprocesses and Nanotechnology Conference, 12P-7-107)
42.	2015/10/29	Dependence on Driving Voltage Waveforms for a Nickel RF-MEMS Switch (Proceedings of the 7th Integrated MEMS Symposium)
43.	2015/10/29	Design on MEMS Actuator for Driving Resonant Yagi-Uda Antenna (Proceedings of the 7th Integrated MEMS Symposium)
44.	2015/10/29	Desing on 60 MHz pn-diode silicon MEMS viration sensor (Proceedings of the 7th Integrated MEMS Symposium, 29pm2-D-2)
45.	2015/10/29	Desing on a 20 MHz pn-diode ring silicon resonator utilizing in-plane vibration (Proceedings of the 7th Integrated MEMS Symposium, 29pm1-D-3)
46.	2015/10/29	Dynamic driving of liquid for use of MEMS variable capacitors (Proceedings of the 7th Integrated MEMS Symposium, 29pm1-D-4)
47.	2015/09/10	LTCC基板を用いたMEMS移相器の開発 (電子情報通信学会ソサイエティ大会)
48.	2014/11/05	Evaluation on Single-crystal Silicon Cantilever-type p-n Diode Actuators (Digest of 2014 International Microprocesses and Nanotechnology Conference)
49.	2014/11/05	Evaluation on Two-port Junction Configuration of a Lamé-Mode Octagonal Microelectromechanical Systems Resonator Driven by a Low DC Bias Voltage (Digest of 2014 International Microprocesses and Nanotechnology Conference)
50.	2014/11/04	A quasi-millimeter wave band phase shifter with MEMS shunt switches (Proc. of 2014 Asia-Pacific Microwave Conference)
51.	2014/11/04	Influence of packaging on frequency drift in MEMS resonators (Digest of IEEE CPMT Symposiumu Japan (ICSJ2014))
52.	2014/10/22	Evaluation of Droplet Electrical-Driving on Fluidic MEMS Capacitors with a Large Capacitance Change Ratio (Proceedings of the 6th Integrated MEMS Symposium)
53.	2014/10/22	Evaluation on 12 MHz Silicon MEMS Resonators with Low-voltage-driven Shifting Electrodes (Proceedings of the 31th Sensor Symposium)
54.	2014/10/22	Evaluation on Capacitance Change Ratio of Fluid MEMS Variable Capacitors (Proceedings of the 6th Integrated MEMS Symposium)
55.	2014/10/22	Evaluation on silicon cantilever driven by pn-diode actuator (Proceedings of the 31th Sensor Symposium)
56.	2014/10/22	Evaluation on transient characteristics in Nickel RF-MEMS switches (Proceedings of the 31th Sensor Symposium)
57.	2014/09/24	MEMSスイッチを用いた準ミリ波帯モノリシック移相器の開発 (電子情報通信学会ソサイエティ大会)
58.	2014/09/24	MEMS移相器をハイブリッド搭載した準ミリ波帯フェイズドアレイアンテナの設計 (電子情報通信学会ソサイエティ大会)
59.	2014/09/24	MEMS振動式八木・宇田アンテナの基礎検討 (電子情報通信学会ソサイエティ大会)
60.	2014/09/24	アパーチャ結合積層アンテナの給電点位置ずれの影響 (電子情報通信学会ソサイエティ大会)
61.	2014/04/17	ミリ波帯フェーズドアレイアンテナ（PAA）と高周波可変フィルタへのMEMS技術の展開 (IEEE　AP-S　Kansai Chapter　特別講演)
62.	2013/11/05	2 - 6 GHz Monolithic Multi-frequency-variable Band Elimination Filter Utilizing Fluid Microelectromechanical System Variable Capacitors (Digest of 2013 International Microprocesses and Nanotechnology Conference, 8B-10-1)
63.	2013/11	A fluid MEMS switch utilizing droplet elongation (Proceedings of the 30th Sensor Symposium, 6PM3-PSS-36)
64.	2013/11	A quasi-millimeter wave MEMS phase shifter with shunt-type MEMS switches (Proceedings of the 5th Integrated MEMS Symposium, 7AM2-E-2)
65.	2013/11	A widely frequency variable UHF bandpass filter with fluid MEMS capacitors (Proceedings of the 5th Integrated MEMS Symposium, 7AM2-E-3)
66.	2013/11	Electrical measurement evaluation on the frequency selection in MEMS resonators (Proceedings of the 30th Sensor Symposium, 6PM3-PSS-62)
67.	2013/11	Influence of stacking error on quasi-millimeter wave aperture coupling antennas (Proceedings of the 5th Integrated MEMS Symposium, 7AM2-E-1)
68.	2013/11	Lifetime evaluation on low driving-voltage MEMS switches using dynamic excitation (Proceedings of the 30th Sensor Symposium, 5PM1-A-2)
69.	2013/11	Peculiar deflection behavior in the detective part of vibratory MEMS Gyroscopes (Proceedings of the 30th Sensor Symposium, 5PM3-PSS-63)
70.	2013/09/17	Extensional (1,2) Modeを用いた300 MHz MEMS金属共振器の作製 (電子情報通信学会ソサイエティ大会、C-6-1)
71.	2013/09/17	GCPWを用いた準ミリ波帯MEMS移相器の基礎検討 (電子情報通信学会ソサイエティ大会、B-1-102)
72.	2013/09/17	MEMS移相器のためのミリ波ハイブリッド伝送線路の設計 (電子情報通信学会ソサイエティ大会、B-1-81)
73.	2013/07/26	Fishbone型MEMS共振器の周波数可変特性の評価 (第4回集積化MEMS技術研究ワークショップ講演予稿集P4)
74.	2013/03/24	RF-MEMS共振器 (平成25年電気学会全国大会「ワイヤレス通信応用RF-MEMS技術」シンポジウム)
75.	2012/11	Variable Resonant-Frequency Tuning for Fishbone-Shaped MEMS Resonator Based on Multi-Physics Simulator (Digest of 2012 International Microprocesses and Nanotechnology Conference)
76.	2012/11	Very Low Voltage Nickel MEMS Switch Based on Dynamic Driving Method (Digest of 2012 International Microprocesses and Nanotechnology Conference)
77.	2012/10	Design of 60 GHz frequency band MEMS phase-shifter utilizing hybrid waveguides (the 4th Integrated MEMS Symposium)
78.	2012/10	Influence of Device Constraint Condition on Frequency Drift (the 29th Sensor Symposium)
79.	2012/10	Low-Driving-Voltage MEMS Switched-Capacitor Utilizing Resonant Phenomenon (the 4th Integrated MEMS Symposium)
80.	2012/10	MEMS Variable Capacitor Utilizing Pulse Voltage Control for Droplet Elongation (the 29th Sensor Symposium)
81.	2012/10	New Evaluation Method with no Rotational Mechanics on the Detection Circuits for Vibratory MEMS Gyroscopes (the 29th Sensor Symposium)
82.	2012/10	Nonlinear Response of the Detective Part in Vibratory MEMS Gyroscopes (the 29th Sensor Symposium)
83.	2012/10	SHF-band meander inductor with high Q-factor (the 4th Integrated MEMS Symposium)
84.	2012/10	Sub-millimeter-wave-band MEMS phase-shifter using GCPW (the 4th Integrated MEMS Symposium)
85.	2012/06	MEMS Fluidic Variable Capacitor for the Application of Wide-Band GHz Filters (The 4th Int. Workshop on Material Issues for MEMS/MST Devices (IWMIMD))
86.	2011/10	High Q-factor 80 MHz Resonator Utilizing Torsional-to-Transverse Vibration Conversion (Digest of 2011 International Microprocesses and Nanotechnology Conference)
87.	2011/10	Lame-Mode Octagonal MEMS Resonator Utilizing Sliding Driving Electrodes (Digest of 2011 International Microprocesses and Nanotechnology Conference)
88.	2011/10	MEMS Resonator: What is the challenge? (Digest of 2011 International Microprocesses and Nanotechnology Conference, Kyoto)
89.	2011/09/14	「集積化RF-MEMSが広げる新しいワイヤレス通信技術とユビキタス社会」 (シンポジウム＜エレクトロニクス材料とプロセス＞（化学工学会　第43回秋季大会）)
90.	2011/09	A 300 MHz Metal Resonator Utilizing the Extensional (1,2) Mode (Proceedings of the 28th Sensor Symposium)
91.	2011/09	A Hexagonal Gyroscope Utilizing Rigidly-coupled Beams (Proceedings of the 28th Sensor Symposium)
92.	2011/09	Adhesion for MEMS Switches with Platinum Bumps (Proceedings of the 28th Sensor Symposium)
93.	2011/09	Evaluation for the Detection Mechanics in Vibratory Characteristics of the Detective Part in MEMS Gyroscopes Utilizing the Electrostatic Force (Proceedings of the 3rd Integrated MEMS Symposium)
94.	2011/09	Evaluation of Driving Characteristics for Vibratory MEMS Gyroscopes Coupled in the Two Directions (Proceedings of the 3rd Integrated MEMS Symposium)
95.	2011/09	EWOD Droplet Transportation in a Closed Channel with a 20 m Narrow Gap (Proceedings of the 3rd Integrated MEMS Symposium)
96.	2011/09	Fluid Control for MEMS Variable Capacitance Based on Liquid Elongation (Proceedings of the 28th Sensor Symposium)
97.	2011/09	Narrow Gap Formation in MEMS Resonators Utilizing Sliding Electrode Mechanical Resonance (Proceedings of the 3rd Integrated MEMS Symposium)
98.	2011/09	Study on a 24-GHz Capacitively-Coupled MEMS Antenna (Proceedings of the 28th Sensor Symposium)
99.	2010/10	Development of Si-based Coplanar Wave-guides with Via Holes for 30 GHz Applications (the 27th Sensor Symposium)
100.	2010/10	Drift of Electrical Characteristics over Time for Fluid MEMS Capacitors (the 27th Sensor Symposium)
101.	2010/10	Evaluation of Dynamic Characteristics for the Detection Mechanics in Vibratory MEMS Gyrosensors (the 27th Sensor　Symposium)
102.	2010/10	Integrated MEMS Switch with a Submicron Narrow Gap (the 27th Sensor Symposium)
103.	2010/10	Optimization for High Q-Factor in Fishbone-Shaped MEMS Resonators (the 27th Sensor Symposium)
104.	2010/10	Sensitivity Improvement for Vibratory MEMS Gyroscopes Utilizing Driving Mass Coupling (the 27th Sensor　Symposium)
105.	2010/10	“Development of Tunable Band-Pass Filter for Use in UHF Wide Band Applications, (the 27th　Sensor Symposium)
106.	2010/09/14	RF-MEMS技術と集積化RF回路技術 (異種機能集積化シンポジウム（秋季第71回応用物理学会学術講演会）)
107.	2010	A Silicon Beam MEMS Resonator with a Sliding Electrode (Digest of 2010 International Microprocesses and Nanotechnology Conference)
108.	2010	MEMS Resonator Utilizing Torsional-to-Transverse Vibration Conversion (Digest of 2010 International Microprocesses and Nanotechnology Conference)
109.	2010	“Highly-Sensitive Rigidly-Coupled Hexagonal Gyroscope, (Digest of 2010 International Microprocesses and Nanotechnology Conference)
110.	2009/11	2.5 GHz Low Insertion Loss MEMS Hybrid Phase Shifters (Digest of 2009 International Microprocesses and Nanotechnology Conference)
111.	2009/11	Characterization on Four-Points-Pinned Ring-Shaped Silicon MEMS Resonator (Digest of 2009 International Microprocesses and Nanotechnology Conference)
112.	2009/10	10 MHz MEMS Resonator Utilizing a Narrow Gap Process (the 26th Sensor Symposium)
113.	2009/10	Equivalent RF Circuit Model on Fluid MEMS Capacitors (the 26th Sensor Symposium)
114.	2009/10	Influence of Contact Resistance for a Shunt-Type MEMS Resistive Switch (the 26th Sensor Symposium)
115.	2009/10	Low-Pass Filter with Fluid MEMS Variable Capacitor (the 26th Sensor Symposium)
116.	2009/10	Study on a Phased-Array Antenna with MEMS Switches (the 26th Sensor Symposium)
117.	2009/10	Suppression of out-of-plane vibration for a Silicon MEMS Resonator (the 26th Sensor Symposium)
118.	2008/10	Extremely High Capacitance Ratio (C/R) RF MEMS Variable Capacitor with Chameleon Actuators (the 25th Sensor Symposium)
119.	2008/10	Silicon Beam Resonator Utilizing the Third Bending Mode (2008 International Microprocesses and Nanotechnology Conference)
120.	2007/11	Design of Low-Driving-Voltage Ingegrated MEMS Switch with Sticking Suppression (2007 International Microprocesses and Nanotechnology Conference)
121.	2007/11	Silicon Fishbone-Shaped Resonant-Frequency-Tunbale MEMS Resonator (2007 International Microprocesses and Nanotechnology Conference)
122.	2007/07/11	GHｚ帯MEMS共振器の研究開発 (第一回イノベーションフォーラムｉｎ滋賀、ＪＳＴイノベーションサテライト滋賀)
123.	2007/06	Built-in Upwards-Bending Electrostatic Actuator of Three-Level-Structural Variable Capacitor (Dig. of The 14th Int. Conf. on Solid-State Sensors, Actuators and Microsystems)
124.	2007/06	Extremely High Capacitance Ratio (C/R) RF MEMS Variable Capacitor with Chameleon Actuators (Dig. of The 14th Int. Conf. on Solid-State Sensors, Actuators and Microsystems)
125.	2007/01/26	防災移動体無線通信システム用アンテナの低消費電力化および小型化のための研究 (第4回防災・情報システムシンポジウム、立命館大学防災システム研究センター)
126.	2006/10	Design and Fabrication of a MEMS RF Switch with Fast Switching Speed (the 23rd Sensor Symposium)
127.	2006/10	Design and Fabrication of a Two-Step-Driven RF-MEMS Switch with Spiral Springs (the 23rd Sensor Symposium)
128.	2006/10	Laterally-Driven RF Micro-Switch with High Isolation (2005 International Microprocesses and Nanotechnology Conference)
129.	2006/10	MEMS RF Switch with Fast Switching Speed (2006 International Microprocesses and Nanotechnology Conference)
130.	2006/10	Two-Step-Driven RF-MEMS Switch with Spiral Springs (2006 International Microprocesses and Nanotechnology Conference)
131.	2005/10/26	Two-Stage-Driven Cantilever-Based RF MEMS Micro-Switch (2005 International Microprocesses and Nanotechnology Conference)
132.	2005/10/20	Design and Fabrication of a Laterally-Driven RF Micro-Switch with High Isolation (the 22nd Sensor Symposium)
133.	2005/10/20	Design and Fabrication of Two-Stage-Driven Cantilever-Based RF MEMS Micro-Switch (the 22nd Sensor Symposium)
134.	2004/10/18	MEMS　RFスイッチの技術動向 ((社)電子情報技術産業協会(JEITA)　集積化MEMS技術専門委員会)
135.	2004/10/08	RF-MEMSおよびRFスイッチの応用と課題 (日本学術振興会「未踏・ナノデバイステクノロジー」第１５１委員会　“産業応用を広げるMEMS，ナノテクを拓くNEMS”シンポジウム)